Silicon nitride waveguide based integrated photonics front-end chip for optical gyroscope
US11656080B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 23, 2022 |
| Grant date | May 23, 2023 |
| Priority date | — |
| Expiry date | Aug 23, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/721
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An integrated photonics optical gyroscope fabricated on a silicon nitride (SiN) waveguide platform comprises (SiN) waveguide-based optical components that constitute a front-end chip to launch light into and receive light from the rotation sensing element, that can be a fiber spool. The SiN waveguide-based components can be distributed between multiple layers that are stacked together to have a multi-layer configuration vertically and evanescently coupled with each other. External elements (e.g., laser, detectors, phase shifter) may be made of different material platform than SiN and can be hybridly integrated or otherwise coupled to the SiN waveguide platform. The phase shifters can be made of electro-optic material, or piezo-electric material or can be thermal phase shifters.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.