Roll stamp for imprint device, and manufacturing method therefor
US11656545B2 · kind B2 · utility
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8Claims
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Assignee
Inventors
Key dates
| Filing date | Nov 15, 2018 |
| Grant date | May 23, 2023 |
| Priority date | — |
| Expiry date | Sep 1, 2039 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C18/34
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention relates to a roll stamp and a method of manufacturing the same, the roll stamp including a cylindrical metal mold including a debossed pattern formed on an outer side and a hollow portion formed on an inner side, and a dummy roller inserted into the hollow portion. Because a joining portion is not formed on the entire area of the cylindrical metal mold, a problem in which edge regions are separated does not occur. Also, due to the absence of the joining portion, it is possible to perform a patterning process continuously.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.