Patent · US Active

Apparatus for the exposure of plate-shaped workpieces with high throughput

US11656556B2 · kind B2 · utility

0Cited by

4References

22Claims

0Family size

Assignee

Laser Imaging Systems GmbH · DE

Inventors

Steffen Ruecker
Uwe Klowsky · Jena, DE

Key dates

Filing date	Dec 11, 2019
Grant date	May 23, 2023
Priority date	—
Expiry date	Dec 21, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH05K13/086
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A movable table system comprising two identical tables on a common rail arrangement having a linear rail region underneath a detection unit and a processing unit, and therefore the tables can be alternatingly moved in a straight line along the common rail arrangement, in the same table-movement direction, fully underneath the detection unit and processing unit, and can be independently controlled by a computer unit. The movable table system provides a new option for processing planar workpieces, in which a particularly high throughput rate and improved precision can be achieved using merely one processing unit.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.