MEMS gyroscope control circuit
US11662205B2 · kind B2 · utility
1Cited by
9References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 19, 2021 |
| Grant date | May 30, 2023 |
| Priority date | — |
| Expiry date | Oct 19, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C25/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microelectromechanical system (MEMS) gyroscope includes a driving mass and a driving circuit that operates to drive the driving mass in a mechanical oscillation at a resonant drive frequency. An oscillator generates a system clock that is independent of and asynchronous to the resonant drive frequency. A clock generator circuit outputs a first clock and a second clock that are derived from the system clock. The drive loop of the driving circuit including an analog-to-digital converter (ADC) circuit that is clocked by the first clock and a digital signal processing (DSP) circuit that is clocked by the second clock.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.