Micromachined gyroscope
US11662206B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Dec 30, 2021 |
| Grant date | May 30, 2023 |
| Priority date | — |
| Expiry date | Dec 30, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5762
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides a micromachined gyroscope, including: a base; an anchor point fixed to the base; a number of vibration structures; and a drive structure used for driving the vibration structure to vibrate in a x-y plane along a ring direction. The drive structure includes at least four groups arranged at intervals along the ring direction and symmetrical about an x axis and a y axis. The micromachined gyroscope works in two vibration modes interchanging with each other, including a driving mode status working in a first mode status and a testing mode status working in a second mode status. By virtue of the configuration described in the invention, the micromachined gyroscope can realize three-axis detection at the same time, and greatly improves the quality utilization rate of the vibration structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.