Edge couplers in the back-end-of-line stack of a photonics chip
US11662523B2 · kind B2 · utility
4Cited by
8References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 19, 2021 |
| Grant date | May 30, 2023 |
| Priority date | — |
| Expiry date | Mar 18, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12147
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Structures including an edge coupler and methods of forming a structure including an edge coupler. The structure includes a waveguide core over a dielectric layer and a back-end-of-line stack over the dielectric layer and the waveguide core. The back-end-of-line stack includes a side edge and a truncated layer that is overlapped with a tapered section of the waveguide core. The truncated layer has a first end surface adjacent to the side edge and a second end surface above the tapered section of the waveguide core. The truncated layer is tapered from the first end surface to the second end surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.