Beam steering correction for attenuating the degradation of positional accuracy of charged particle and laser light beams caused by mechanical vibrations
US11664187B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 10, 2021 |
| Grant date | May 30, 2023 |
| Priority date | — |
| Expiry date | Jul 22, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24585
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus comprising a beam emitter to emit a beam comprising electrons, ions or laser-light photons toward a target substrate. A motion sensor to detect mechanical vibrations of the target substrate. The motion sensor is mechanically coupled to the target substrate, a processor coupled to an output of the motion sensor. The processor is to generate a vibration correction signal proportional to the mechanical vibrations detected by the motion sensor, and beam steering optics coupled to the processor. The beam steering optics are to deflect the beam according to the vibration correction signal to compensate for the mechanical vibrations of the target substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.