Stepper motor proportional control bellows valve
US11668409B2 · kind B2 · utility
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13References
8Claims
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Key dates
| Filing date | Dec 10, 2021 |
| Grant date | Jun 6, 2023 |
| Priority date | — |
| Expiry date | Dec 10, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0635
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A stepper motor proportionally controlled bellows valve system comprising: a valve manifold; one or more stepper motors; and one or more bellows valves. The one or more bellows valves may comprise a bellows, a sealing washer, and a profile washer. The sealing washer is configured to removeably engage with a vacuum orifice rim. The profile washers are configured to stick into the valve orifice, such that the profile washer defines a flow through the valve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.