Sample analysis apparatus and method
US11668662B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 21, 2021 |
| Grant date | Jun 6, 2023 |
| Priority date | — |
| Expiry date | Jan 24, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/079
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Characteristic X-rays (soft X-rays) from a sample are detected using a spectroscope to thereby generate a plurality of intensity spectrums arranged in order of time sequence. A contour map creation unit creates a contour map by converting, in accordance with a color conversion condition, the plurality of intensity spectrums into a plurality of one-dimensional maps, and arranging the plurality of one-dimensional maps in order of time sequence. When displaying the contour map, a waveform array and a difference contour map may also be displayed. Based on the contour map, a timepoint at which a state change occurs in the sample is determined.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.