Atomic force microscope
US11668729B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jul 16, 2020 |
| Grant date | Jun 6, 2023 |
| Priority date | — |
| Expiry date | Jul 16, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q30/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to an atomic force microscope for evaluating a surface of a sample, comprising a sample holder, having a first zone suitable for receiving the sample mounted in a stationary manner, a probe having a tip able to be positioned facing the surface of the sample, the microscope being configured to allow an adjustment of a position of the tip relative to the surface, and a support, the sample holder having at least one second zone, separate from the first zone and stationary relative to the support, the sample holder being deformable so as to allow a relative movement of the first zone with respect to the second zone, and the microscope comprising a detector able to detect a movement of the first zone relative to the second zone.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.