Patent · US Active

Out-of-plane hinge for micro and nanoelectromechanical systems with reduced non-linearity

US11674344B2 · kind B2 · utility

0Cited by

1References

18Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Samer DAGHER · Grenoble, FR
Loic Joet · Grenoble, FR

Key dates

Filing date	Dec 17, 2019
Grant date	Jun 13, 2023
Priority date	—
Expiry date	Dec 12, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH04R19/005
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A hinge for a microelectromechanical system includes a fixed part and a part movable relative to the fixed part along at least an out-of-plane direction, the hinge being intended to suspend the moving part from the fixed part. The hinge includes a first rigid part, a second part fixed to the first part at one end and intended to be anchored to the fixed part or the moving part. The second part deforms in bending in a first direction, two third parts are fixed to the first part and are anchored to the moving part or the fixed part, and the third parts deform in bending along a second direction orthogonal to the first direction.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.