Mechanical link for MEMS and NEMS mechanical structure, and MEMS and NEMS structure comprising such a mechanical link

US11674859B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Loic Joet · Grenoble, FR
• Patrice Rey · Voiron, FR
• Thierry Verdot · Yssingeaux, FR

Key dates

• Filing date: Jul 13, 2020
• Grant date: Jun 13, 2023
• Expiry date: Oct 20, 2041

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/0118
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A mechanical link for microelectromechanical and/or nanoelectromechanical structure, includes a mobile component, a fixed component extending on a plane, and apparatus for detecting displacement of the mobile component relative to the fixed component. The mechanical link includes: a first link to the fixed component and mobile component, allowing rotation of the mobile component relative to the fixed component about an axis of rotation; a second link connecting the mobile component to the detection apparatus at a distance and perpendicular to the axis of rotation; a third link to the fixed component and detection apparatus, guiding the detection apparatus in a direction of translation in the plane; wherein the combination of the second link and third link can transform rotational movement of the mobile component into translational movement of the detection apparatus in the direction of translation. The detection apparatus includes a piezoresistive/piezoelectric strain gauge, resonance beam, capacitance, or combination thereof.