Gas sensor
US11674916B2 · kind B2 · utility
0Cited by
2References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 12, 2018 |
| Grant date | Jun 13, 2023 |
| Priority date | — |
| Expiry date | Jun 3, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/226
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gas sensing device comprising a substrate comprising an etched cavity portion and a substrate portion, a dielectric layer disposed on the substrate, wherein the dielectric layer comprises a dielectric membrane, wherein the dielectric membrane is adjacent to the etched cavity portion of the substrate, a heater located within the dielectric layer; a material for sensing a gas; and one or more polysilicon electrodes coupled with the material for sensing a gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.