Scanning probe microscope with a sample holder fed with electromagnetic wave signals
US11674976B2 · kind B2 · utility
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19Claims
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Assignee
Inventor
Key dates
| Filing date | Dec 13, 2019 |
| Grant date | Jun 13, 2023 |
| Priority date | — |
| Expiry date | Feb 12, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q30/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning probe microscope including a holder having at least one electric port, wherein the holder is configured to support a sample to be imaged. The scanning probe microscope further includes a probe and an actuator configured to move at least one of the holder and the probe up to three directions. The scanning probe microscope further includes a reflectometer configured to measure reflection and/or transmission coefficients at each of the at least one electric ports of the holder by feeding each of the at least one electric ports of the holder with electromagnetic wave signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.