Mass flow controller with advanced zero trending diagnostics
US11675374B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 24, 2019 |
| Grant date | Jun 13, 2023 |
| Priority date | — |
| Expiry date | Oct 24, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/25312
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A diagnostics system, for mass flow controller calibration, comprising a controller communicable coupled to a sensor(s) and a valve. The controller controls the valve based on a predetermined set point value and communication from the at least one sensor. The controller determines a number of set point value adjustments and compares results of a calibration operation and a set point value plus a tolerance value. The controller generates a notification message indicating at least one of the predetermined number of set point value adjustments and results of the comparing. The controller calibrates the mass flow controller based on, at least in part, one of a predetermined number of set point value adjustments, results of the comparison, and user input. The notification message can comprise temperature values, valve drive values, sensor flow rate values, gas flow hours, and a remaining number of set point adjustments based on a total fluid hours.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.