Patent · US Active

Film resistor and thin-film sensor with a piezoresistive layer

US11676743B2 · kind B2 · utility

0Cited by

25References

16Claims

0Family size

Assignee

TDK Electronics AG · JP

Inventors

Bettina Milke · Berlin, DE
Bernhard Ostrick · Teltow, DE

Key dates

Filing date	Jun 18, 2018
Grant date	Jun 13, 2023
Priority date	—
Expiry date	Mar 25, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01C17/0652
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A film resistor and a thin-film sensor are disclosed. In an embodiment a film resistor includes a piezoresistive layer including a first transition metal carbide.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.