Vacuum chamber, feedthrough system for vacuum chamber and methods
US11679366B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 1, 2022 |
| Grant date | Jun 20, 2023 |
| Priority date | — |
| Expiry date | Apr 1, 2042 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J3/03
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A vacuum chamber may include an ambient side and a vacuum side. The vacuum chamber may be configured to carry a feedthrough that may include a hollow tube, a first O-ring captured by a first recess within the hollow tube and a rod extending through the hollow tube. The outer circumference of the rod may be configured to contact an entirety of an inner circumference of the first O-ring. A vacuum fitting having an inner circumference may be fixedly secured to the hollow tube. The rod may be operable to be linearly movable within the hollow tube and may be rotatably movable about an axis within the hollow tube. An object may be secured to the rod and may be linearly and rotatably moved within the vacuum chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.