Photoresist bottle replacement system
US11679510B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 7, 2020 |
| Grant date | Jun 20, 2023 |
| Priority date | — |
| Expiry date | Apr 15, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0012
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
The present disclosure describes a method for replacing a photoresist (PR) bottle using a vehicle. An exemplary vehicle includes a processor configured to receive a request signal to replace a first PR bottle. The processor is also configured to transmit an order based on the request signal. The vehicle also includes a plurality of wheels configured to move the vehicle from the first location to a second location, and from the second location to the first location. The vehicle further includes a robotic arm configured to load, at the first location, the first PR bottle into a first container; load a second PR bottle in a second container; remove a cap from the second PR bottle and a socket from the first PR bottle; couple the socket of the first PR bottle to the second PR bottle; and unload the second PR bottle from the second container.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.