Imprinting device and imprinting method
US11679543B2 · kind B2 · utility
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15Claims
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Key dates
| Filing date | Sep 10, 2019 |
| Grant date | Jun 20, 2023 |
| Priority date | — |
| Expiry date | Jan 22, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/00
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
This application relates to an imprinting apparatus and method. In one aspect, the imprinting apparatus applies pressure between a master substrate and a polymer film to transfer a pattern formed on the master substrate to the polymer film. The imprinting apparatus includes a plurality of coils and the surface of the master substrate is heated by an electromagnetic field induced by the plurality of coils. Through holes are defined in each of the plurality of coils, and support bars are inserted into the through holes. The positions of the plurality of coils are changed corresponding to the master substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.