Substrate positioning for deposition machine
US11679602B2 · kind B2 · utility
1Cited by
3References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 29, 2020 |
| Grant date | Jun 20, 2023 |
| Priority date | — |
| Expiry date | Jul 3, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/135
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A deposition device is described. The deposition device has a substrate support and a laser imaging system disposed to image a portion of a substrate positioned on the substrate support. The laser imaging system comprises a laser source and an imaging unit, and is coupled to a deposition assembly disposed across the substrate support.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.