Patent · US Active

Multipoint surface temperature measurement system and method thereof

US11680854B2 · kind B2 · utility

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5References
5Claims
0Family size

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Key dates

Filing dateMay 11, 2022
Grant dateJun 20, 2023
Priority date
Expiry dateMay 11, 2042

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01K2213/00
  • WIPO fieldAudio-visual technology
  • WIPO sectorElectrical engineering

Abstract

Examples of a fiber optic temperature measuring system for measuring a temperature of a surface at multiple points simultaneously in real time is provided. The fiber optic temperature measuring system comprises a fiber optic probe with fiber bundle with plurality of individual fibers with thermographic phosphor at the fiber's tip and a high-speed camera. Invention allows accurate multipoint measurement of ESC' surface temperature. The thermographic phosphor is embedded in a nudge at the tip of each individual fibers or on the surface (under the surface) at predetermined positions.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.