Hybrid probe, physical property analysis apparatus including the same, and method of measuring semiconductor device using the apparatus
US11680898B2 · kind B2 · utility
0Cited by
6References
17Claims
0Family size
Assignee
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Key dates
| Filing date | Feb 24, 2021 |
| Grant date | Jun 20, 2023 |
| Priority date | — |
| Expiry date | Sep 10, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/061
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A hybrid probe includes a probe body including a wiring and extending in a first direction; and a probe tip coupled to the probe body and including a first antenna, a second antenna, and an isolation layer. The hybrid probe may operate in a reflection mode using the first antenna and the second antenna, and operate in a transmission mode using the second antenna.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.