Method for monitoring polarization quality of piezoelectric film
US11680974B2 · kind B2 · utility
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Key dates
| Filing date | May 25, 2021 |
| Grant date | Jun 20, 2023 |
| Priority date | — |
| Expiry date | Nov 20, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/857
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for monitoring polarization quality of a piezoelectric film is described. In this method, a detection step is performed on a piezoelectric film by using a detection device with a non-contact method during a polarization process of the piezoelectric film, to obtain a static electricity information or a transmittance information. A determination step is performed by using the static electricity information or the transmittance information to determine a polarization degree of the piezoelectric film.
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