MEMS mirror driven by dual pulse drive signal
US11681140B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 22, 2020 |
| Grant date | Jun 20, 2023 |
| Priority date | — |
| Expiry date | Sep 7, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/122
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Mirror control circuitry operates to control a movable mirror. The mirror control circuitry includes drive circuitry for providing a drive signal to the movable mirror, and a processor. The processor causes the drive circuitry to generate the drive signal so as to have pulses with leading edges occurring an offset period of time after a maximum opening angle of the movable mirror and trailing edges occurring an offset period of time before a zero crossing of the movable mirror. The processor may sample a mirror sense signal from the movable mirror at times at which a derivative of capacitance of the movable mirror with respect to time is zero, and then perform an action based upon the samples.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.