Patent · US Active

Manufacturing method of display substrate for removing residual sand

US11682679B2 · kind B2 · utility

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11Claims
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Key dates

Filing dateAug 31, 2020
Grant dateJun 20, 2023
Priority date
Expiry dateMar 18, 2041

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10K71/621
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

The present disclosure provides a manufacturing method of a display substrate, a display substrate and a display device, belongs to the field of display technology, and can at least partially solve a problem of residual sand in the display substrate. The manufacturing method of the display substrate includes: providing a base; forming a passivation layer on a surface of the base; forming an amorphous oxide conductive material layer on a surface of the passivation layer facing away from the base; forming a photoresist pattern on the oxide conductive material layer, the photoresist pattern having an exposure region; etching a portion of the oxide conductive material layer in the exposure region of the photoresist pattern to form a hollow position exposing a portion of the passivation layer; and removing a certain thickness material of the portion of the passivation layer exposed through the hollow position.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.