Covalent organic framework patterning on substrates
US11685657B2 · kind B2 · utility
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22Claims
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Key dates
| Filing date | Oct 23, 2020 |
| Grant date | Jun 27, 2023 |
| Priority date | — |
| Expiry date | Mar 17, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y40/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method of forming a pattern in a substrate material includes positioning a layer of a covalent organic framework polymer including nanoscale holes or pores therein over the substrate material as a template having nanoscale holes or pores therein to form a templated assembly and applying an etching process to the templated assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.