Patent · US Active

Exposure monitor device

US11686763B2 · kind B2 · utility

2Cited by
50References
22Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 28, 2022
Grant dateJun 27, 2023
Priority date
Expiry dateFeb 28, 2042

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R31/2874
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The disclosed technology generally relates to integrated circuit devices with wear out monitoring capability. An integrated circuit device includes a wear-out monitor device configured to record an indication of wear-out of a core circuit separated from the wear-out monitor device, wherein the indication is associated with localized diffusion of a diffusant within the wear-out monitor device in response to a wear-out stress that causes the wear-out of the core circuit.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.