In-situ fingerprinting for electrochemical deposition and/or electrochemical etching

US11692282B2 · kind B2 · utility

Assignee

• ancosys GmbH · DE

Inventors

• Juerg Stahl · Winterthur, CH
• Norbert Schroeder · Dresden, DE
• Fred Richter · Dresden, DE

Key dates

• Filing date: Sep 9, 2020
• Grant date: Jul 4, 2023
• Expiry date: Sep 9, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N27/4166
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Electrochemical analysis method and system for monitoring and controlling the quality of electrochemical deposition and/or plating processes. The method uses a fingerprinting analysis method of an output signal to indicate whether the chemistry and/or process is operating in the normally expected range and utilizes one or more substrates as working electrode(s) and a) whereby the potential between the one or more working electrodes and one or more reference electrodes is analyzed to provide an output signal fingerprint which is represented as potential difference as a function of time or b) the input power of a process power supply to provide input energy in the form of current and/or potential between the working electrode(s) and a counter-electrode whereby the method utilizes the potential between the one or more working electrode(s) and at least one of: one or more reference electrodes; or one or more counter-electrodes; to provide an output signal fingerprint.