Optical particle sensor module

US11692925B2 · kind B2 · utility

Assignee

• TRUMPF PHOTONIC COMPONENTS GMBH · DE

Inventors

• Johannes Hendrikus Maria Spruit · Eindhoven, NL
• Alexander Marc Van Der Lee · Eindhoven, NL
• Petrus Theodorus Jutte · Ulm, DE
• Holger Moench · Vaals, NL
• Joachim Wilhelm Hellmig · Eindhoven, NL
• Roy Ovink · Eindhoven, NL

Key dates

• Filing date: Jun 7, 2019
• Grant date: Jul 4, 2023
• Expiry date: Feb 2, 2042

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2015/1486
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A laser sensor module for detecting a particle density of small particles with a particle size between 0.05 μm and 10 μm includes a first laser configured to emit a first measurement beam, a second laser configured to emit a second measurement beam, and an optical arrangement configured to focus the first measurement beam to a first measurement volume and to focus the second measurement beam to a second measurement volume. The optical arrangement includes a first numerical aperture and a second numerical aperture arranged to detect a predetermined minimum particle size. The laser sensor module further includes a first detector configured to determine a first self-mixing interference signal of a first optical wave, a second detector configured to determine a second self-mixing interference signal of a second optical wave, and an evaluator.