Patent · US Active

Electrostatic charge sensor with high impedance contact pads

US11693039B2 · kind B2 · utility

0Cited by
4References
20Claims
0Family size

Assignee

Inventor

Key dates

Filing dateNov 29, 2021
Grant dateJul 4, 2023
Priority date
Expiry dateNov 29, 2041

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R29/24
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A device provides high impedance contact pads for an electrostatic charge sensor. The contact pads are shared between the electrostatic charge sensor and drivers. The contact pads are set to a high impedance state by reducing current leakage through the drivers. Compared to electrostatic charge sensor with low impedance contact pads, the electrostatic charge sensor disclosed herein has high sensitivity, and is able to detect weak electrostatic fields.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.