Optical waveguide device
US11693290B2 · kind B2 · utility
1Cited by
6References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 2, 2021 |
| Grant date | Jul 4, 2023 |
| Priority date | — |
| Expiry date | Jul 18, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2202/20
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical waveguide device includes a substrate on which an intermediate layer, a thin-film LN layer of lithium niobate, and a buffer layer are stacked; an optical waveguide formed in the thin-film LN layer; and a plurality of electrodes near the optical waveguide. The intermediate layer and the buffer layer contain a same material of a metal element of any one of group 3 of group 18 of a periodic table of elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.