Optical waveguide device and method of manufacturing optical waveguide device
US11693291B2 · kind B2 · utility
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Key dates
| Filing date | Feb 8, 2021 |
| Grant date | Jul 4, 2023 |
| Priority date | — |
| Expiry date | Jul 13, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2201/07
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical waveguide device has a substrate, an intermediate layer, a thin-film LN layer containing an X-cut lithium niobate, and a buffer layer stacked on the substrate, and an optical waveguide having a ridge shape formed in the thin-film LN layer. The optical waveguide device includes a plurality of electrodes provided, respectively, at a first side and a second side of the optical waveguide. The electrodes are disposed so that respective bottom surfaces thereof are at positions lower than a position of a surface of the buffer layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.