Deposition on two sides of a web
US11695125B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 17, 2018 |
| Grant date | Jul 4, 2023 |
| Priority date | — |
| Expiry date | Dec 28, 2038 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/897
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Apparatuses and methods for depositing materials on both sides of a web while it passes a substantially vertical direction are provided. In particular embodiments, a web does not contact any hardware components during the deposition. A web may be supported before and after the deposition chamber but not inside the deposition chamber. At such support points, the web may be exposed to different conditions (e.g., temperature) than during the deposition. Also provided are substrates having materials deposited on both sides that may be fabricated by the methods and apparatuses.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.