Patent · US Active

Acoustic resonator device with controlled placement of functionalization material

US11695384B2 · kind B2 · utility

0Cited by

6References

20Claims

0Family size

Assignee

Qorvo Biotechnologies, LLC · US

Inventors

Matthew Ryder · Attleboro, US
Rio Rivas · Corvallis, US
Thayne L. Edwards · Bend, US

Key dates

Filing date	Aug 10, 2022
Grant date	Jul 4, 2023
Priority date	—
Expiry date	Aug 10, 2042

Classification

Technology area (CPC H)Electricity
CPC primaryH03H2009/155
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micro-electrical-mechanical system (MEMS) resonator device includes at least one functionalization material arranged over at least a central portion, but less than an entirety, of a top side electrode. For an active region exhibiting greatest sensitivity at a center point and reduced sensitivity along its periphery, omitting functionalization material over at least one peripheral portion of a resonator active region prevents analyte binding in regions of lowest sensitivity. The at least one functionalization material extends a maximum length in a range of from about 20% to about 95% of an active area length and extends a maximum width in a range of from about 50% to 100% of an active area width. Methods for fabricating MEMS resonator devices are also provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.