Patent · US Active

Micromechanical device including a stop spring structure

US11697583B2 · kind B2 · utility

0Cited by

5References

7Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Cristian Nagel · Reutlingen, DE
Johannes Classen · Reutlingen, DE
Rolf Scheben · Stuttgart, DE
Rudy Eid · Stuttgart, DE

Key dates

Filing date	Apr 7, 2021
Grant date	Jul 11, 2023
Priority date	—
Expiry date	Jan 11, 2042

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0874
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micromechanical device including a substrate, a movable mass, and a stop spring structure, which includes a stop. The substrate includes a substrate surface in parallel to a main extension plane and the movable mass is situated movably above the substrate surface in relation to the substrate. The stop spring structure is connected to the movable mass. The stop is designed to strike against the substrate surface in the event of a deflection of the movable mass in a z direction, perpendicular to the main extension plane. The stop spring structure, at the location of the stop, includes a first spring constant, a second spring constant, in parallel to the main extension plane, and a third spring constant, in parallel to the main extension plane and perpendicular to the x direction. The first spring constant is greater than the second spring constant and/or is greater than the third spring constant.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.