High-stability nano-radian-order angle measuring method and device based on drift value feedback
US11698249B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 17, 2021 |
| Grant date | Jul 11, 2023 |
| Priority date | — |
| Expiry date | Nov 19, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/30
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed is a high-stability nano-radian-order angle measuring method and device based on drift value feedback, belonging to the technical field of precision measurement and the field of optical engineering. The device consists of LED light sources, convex lenses, multi-slit diaphragms, beam splitters, deflecting mirrors, steering mirrors, a collimator objective set, linear array CCDs, a four-quadrant position detector and a plane mirror. The method includes: enabling two paths of measuring light beams to carry angle change information of a measured object, respectively forming respective images on two sensors, and calculating a pitch angle and a yaw angle of the measured object relative to an optical axis by using positions of the two images so as to achieve the detection capability on the angle change of the measured object. While a focal distance of the objective is greatly improved by using the collimator objective set, the linear array CCDs are used as sensors to improve a measuring range. Therefore, the technical advantage of nano-radian-order angle limit resolution is achieved under the condition of the same measuring range. The LED light sources, the convex lenses and the …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.