Light sensor using pixel optical diffraction gratings having different pitches
US11698296B2 · kind B2 · utility
0Cited by
2References
18Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Sep 17, 2020 |
| Grant date | Jul 11, 2023 |
| Priority date | — |
| Expiry date | Jul 2, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2001/444
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A light sensor includes a semiconductor substrate supporting a number of pixels. Each pixel includes a photoconversion zone extending in the substrate between a front face and a back face of the substrate. An optical diffraction grating is arranged over the back face of the substrate at a position facing the photoconversion zone of the pixel. For at least two different pixels of the light sensor, the optical diffraction gratings have different pitches. Additionally, the optical grating of each pixel is surrounded by an opaque wall configured to absorb at operating wavelengths of the sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.