Nondestructive imaging and surface quality inspection of structured plates
US11698326B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 30, 2020 |
| Grant date | Jul 11, 2023 |
| Priority date | — |
| Expiry date | Jan 27, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/9583
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system includes a stage, a detector and a measuring device. The stage is configured to hold a substrate. The substrate includes a plurality of tapered structures, and each of the plurality of tapered structures includes a tapered wall between first and second openings at opposite ends of the plurality of tapered structures. The detector is tilted at a first angle and configured to measure light reflected from the tapered wall at about 90 degrees to the tapered wall. The first angle depends at least in part a second angle between the tapered wall and a longitudinal axis running through the tapered structure. The measuring device is configured to determine a characteristic of the tapered wall and whether the characteristic of the tapered wall is above or below a threshold.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.