Collector mirror and apparatus for creating extreme ultraviolet light including the same
US11698590B2 · kind B2 · utility
0Cited by
8References
20Claims
0Family size
Assignee
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Key dates
| Filing date | Mar 31, 2022 |
| Grant date | Jul 11, 2023 |
| Priority date | — |
| Expiry date | Mar 31, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05G2/009
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A collector mirror for an extreme ultraviolet (EUV) light generator includes a first mirror in a vessel, the vessel being configured to receive a material and a laser beam for generating the EUV light, a second mirror surrounding the first mirror, and a detachable third mirror between the first mirror and the second mirror, the third mirror having an inner diameter that is not smaller than an outer diameter of the first mirror, and an outer diameter that is not larger than an inner diameter of the second mirror.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.