Neural network training device, system and method
US11699224B2 · kind B2 · utility
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33Claims
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Key dates
| Filing date | Nov 9, 2021 |
| Grant date | Jul 11, 2023 |
| Priority date | — |
| Expiry date | Nov 9, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06V2201/06
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A device includes image generation circuitry and convolutional-neural-network circuitry. The image generation circuitry, in operation, generates a digital image representation of a wafer defect map (WDM). The convolutional-neural-network circuitry, in operation, generates a defect classification associated with the WDM based on: the digital image representation of the WDM and a data-driven model associating WDM images with classes of a defined set of classes of wafer defects and generated using a training data set augmented based on defect pattern orientation types associated with training images.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.