Control method for rectification and purification system of electronic-grade chlorine trifluoride
US11701599B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 28, 2021 |
| Grant date | Jul 18, 2023 |
| Priority date | — |
| Expiry date | Oct 28, 2041 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P20/50
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present disclosure provides a control method for a rectification and purification system of electronic-grade chlorine trifluoride. A rectification device of electronic-grade chlorine trifluoride includes a two-stage cryogenic rectification device including a low-boiling column and a high-boiling column. An extraction agent is arranged in the two-stage cryogenic rectification device for further dissociating associated molecules of hydrogen fluoride and chlorine trifluoride to meet the requirements of electronic-grade chlorine trifluoride. The reflux ratio parameter stability of a vapor-liquid (chlorine trifluoride-hydrogen fluoride) phase equilibrium system can be effectively improved by a column plate temperature control method, thus realizing wide dynamic smooth running under various working conditions. The column plate temperature control method can achieve an effective separation of chlorine trifluoride and various impurity components by deep rectification technology, yielding electronic-grade chlorine trifluoride through purification.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.