Online trimming device and method for micro-shell resonator gyroscope
US11703356B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 16, 2023 |
| Grant date | Jul 18, 2023 |
| Priority date | — |
| Expiry date | Jan 16, 2043 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/0143
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An online trimming device and method for a micro-shell resonator gyroscope is provided. A micro-shell resonator gyroscope fixing fixture and a mode test circuit in the device are placed in a vacuum test cavity provided with a circuit interface. The mode test circuit and a host computer are connected through a circuit interface on the vacuum test cavity. The gyroscope fixing fixture is provided with a signal interface, and the electrodes on the gyroscope substrate are connected to the signal interface. The signal interface on the fixture is connected to the mode test circuit. The laser etching module is located at the top of the device. An opening is formed in the gyroscope fixing fixture. The vacuum test cavity is provided with a transparent trimming window. The laser acts on the edge of the resonant structure of the gyroscope through the trimming window and the through hole of the fixture.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.