Material processing path selection method and device

US11703839B2 · kind B2 · utility

Assignee

• BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD. · CN

Inventor

• Lin Cui · Longbeilingcun, CN

Key dates

• Filing date: Mar 4, 2022
• Grant date: Jul 18, 2023
• Expiry date: Mar 4, 2042

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67739
• WIPO field: IT methods for management
• WIPO sector: Electrical engineering

Abstract

A material processing path selection method includes calculating a plurality of candidate material processing paths, determining a bottleneck process tank, and for each of the plurality of candidate material processing paths, calculating a bottleneck process tank utilization rate to select a candidate material processing path with a highest bottleneck process tank utilization rate in the plurality of candidate material processing paths as a target material processing path. The bottleneck process tank is a process tank having a highest use frequency among all process tanks, A use frequency of the process tank is equal to a total process time length of all materials that need to be transferred to the process tank divided by a number of all the materials that need to be transferred to the process tank.