Charged particle beam manipulation device and method for manipulating charged particle beamlets
US11705301B2 · kind B2 · utility
0Cited by
13References
15Claims
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Assignee
Inventor
Key dates
| Filing date | Jan 19, 2021 |
| Grant date | Jul 18, 2023 |
| Priority date | — |
| Expiry date | Jan 19, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/153
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
It is provided a charged particle beam manipulation device for a plurality of charged particle beamlets, the charged particle beam manipulation device including a lens having a main optical axis, the lens including at least a first array of multipoles, each multipole of the first array of multipoles configured to compensate for a lens deflection force on a respective charged particle beamlet of the plurality of charged particle beamlets, the lens deflection force being a deflection force produced by the lens on the respective charged particle beamlet towards the main optical axis of the lens.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.