Variable frequency and non-sinusoidal power generator using double side cooling, plasma processing apparatus including the same and method of manufacturing semiconductor device using the same
US11705306B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 9, 2021 |
| Grant date | Jul 18, 2023 |
| Priority date | — |
| Expiry date | Nov 18, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/002
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A variable frequency and non-sinusoidal power generator includes a pulse module circuit, a slope module circuit, and first and second cooling systems. The pulse module circuit and the slope module circuit includes control switches, and generates at least one of a output currents and a output voltages by selectively turning on/off the control switches based on control signals. The first and second cooling systems are disposed at first and second sides of the control switches. A bias power having a variable frequency and a non-sinusoidal waveform is generated based on the control signals, at least one of the output currents and the output voltages.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.