Germanium based focal plane array for the short infrared spectral regime
US11705469B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 26, 2021 |
| Grant date | Jul 18, 2023 |
| Priority date | — |
| Expiry date | Sep 15, 2041 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/50
Abstract
Light detecting structures comprising a Si base having a pyramidal shape with a wide incoming light-facing pyramid bottom and a narrower pyramid top and a Ge photodiode formed on the Si pyramid top, wherein the Ge photodiode is operable to detect light in the short wavelength infrared range, and methods for forming such structures. A light detecting structure as above may be repeated spatially and fabricated in the form of a focal plane array of Ge photodetectors on silicon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.