MEMS resonance control using phase detection
US11706392B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Sep 20, 2021 |
| Grant date | Jul 18, 2023 |
| Priority date | — |
| Expiry date | Sep 20, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/017
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A light projection system includes a MEMS mirror operating on a mirror drive signal to generate a mirror sense signal resulting from operation of the MEMS mirror based on the mirror drive signal. A mirror driver generates the mirror drive signal from a drive control signal. A controller receives the mirror sense signal from the MEMS mirror, obtains a first sample of the mirror sense signal at a first phase thereof, obtains a second sample of the mirror sense signal at a second phase thereof, wherein the first and second phases are separated by a half period of the mirror drive signal, with the second phase occurring after the first phase, and generates the drive control signal based on a difference between the first and second samples to keep the mirror drive signal separated in phase from the mirror sense signal by a desired amount of phase separation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.