Device and method for detecting wavefront error by modal-based optimization phase retrieval using extended Nijboer-Zernike theory
US11709111B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 17, 2020 |
| Grant date | Jul 25, 2023 |
| Priority date | — |
| Expiry date | Nov 7, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M11/0221
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The disclosure provides a device for detecting a wavefront error by modal-based optimization phase retrieval using an extended Nijboer-Zernike (ENZ) theory. The detection device includes a point light source (1), a half mirror (2), a lens (3) to be tested, a plane mirror (4) and an image sensor (5). The wavefront error of the component under test is characterized by using a Zernike polynomial, and a Zernike polynomial coefficient is solved based on an ENZ diffraction theory. The present disclosure realizes the one-time full-aperture measurement on the wavefront error of a large-aperture optical component, and can use a partially overexposed image to achieve accurate wavefront error retrieval. Meanwhile, the present disclosure overcomes the contradiction between underexposure and high signal-to-noise ratio (SNR) caused by a limited dynamic range when the image sensor (5) acquires an image. The detection device is simple and does not have high requirements for the experimental environment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.