Atomic force microscope using artificial intelligence object recognition technology and operation method thereof
US11709180B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 11, 2021 |
| Grant date | Jul 25, 2023 |
| Priority date | — |
| Expiry date | May 11, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/20081
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An atomic force microscope includes a sample stage on which a sample is placed, a cantilever including a probe tip, a laser radiating a laser beam to the cantilever, a photodetector receiving a laser beam reflected from the cantilever, a first camera photographing the sample and the cantilever, a second camera photographing the cantilever and the spot of the laser beam, and a processor electrically connected to the first and second cameras and the photodetector to process data acquired by the first and second cameras and the photodetector. An operation method of the atomic force microscope includes detecting the positions of the cantilever and the sample using the first camera, adjusting the position of the sample, detecting the positions of the laser and the cantilever using the second camera, aligning the laser, detecting the position of the laser beam using the photodetector, and aligning the position of the photodetector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.