Micromechanical mirror device, mirror system, and method for producing a micromechanical mirror device

US11709354B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Christian Huber · Zwingenberg, DE
• Marc Schmid · Oppenweiler, DE
• Reinhold Roedel · Reutlingen, DE
• Christoph Schelling · Stuttgart, DE
• Christoph Daniel Kraemmer · Malsch, DE

Key dates

• Filing date: Jan 24, 2019
• Grant date: Jul 25, 2023
• Expiry date: May 24, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B26/001
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A micromechanical mirror device, a mirror system, and a method for producing a micromechanical mirror device are disclosed. The mirror device comprises a first mirror element, which is flat, and a second mirror element, which is flat. The first and second mirror elements are arranged substantially plane-parallel. An intermediate space between the first and second mirror elements has a lower index of refraction than one or both of the first mirror element and second mirror element. The first and second mirror elements are locally spaced apart from each other by at least one support structure. The support structure overlaps with the first and second mirror elements in an axial direction, which is perpendicular to the first and second mirror elements. The support structure includes a material that is different from a material from which one or both of the first and second mirror elements are formed.